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  Cryopump Repair Parts  
 


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Cryopump repair parts for the Cryo-Torr* 8/8F and Cryo-Plex** 8/LP Cryopumps.

Cryopump repair parts for the Cryo-Torr* 10, 400/500 and Cryo-Plex**10/16 Cryopumps.

It is recommended that you visually inspect all parts while performing routine maintenance. Check for any signs of excessive wear or damage. Mark any items on this list that may need to be replaced, and file with the pump performance log.

These repair parts were manufactured to meet or exceed the OEM quality standards by a dedicated repair facility conducting major cryopump

overhauls for government and semiconductor fabs on a large scale basis. All parts are Made In USA.

********CAUTION!!!!!*********

All bearings are specially designed aircraft bearings that have been cleaned and repacked with special bearing grease that will not break down in the helium environment! Do not attempt to replace bearings that are purchased from a normal bearing distributor. They will NOT come supplied with the special grease, and will result in cryopump failure or contamination.

IMPORTANT NOTE: THESE REPLACEMENT PARTS ARE NOT OEM SPARE  PARTS. THEY ARE FULLY INTERCHANGEABLE PARTS THAT WERE DESIGNED AND MANUFACTURED TO MEET OR EXCEED THE OEM SPECIFICATIONS.

These parts are offered to and sold exclusively through Austin Cryogenics Company.

 

*Cryo-Torr is a registered trademark of Helix Technology Corp.

**Cryo-Plex is a registered trademark of Austin Scientific Co., Inc.

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CT-8/8F

Item Order P/N Equivalent           CTI P/N Equivalent Austin Scientific P/N Description Qty/Pump Cost Each USD
1 100098 3592009  4060-0011 Seal, No. 2 Displacer, CT-8,400/500 1  $135.00
2    3592011    Tool, Seal Insertion  1   
3    3592076    No.2 Displacer  1   
4  400022 52-07-50  3320-0005 Pin, No.2 Displacer  1  $1.00
5    3592069    Trunnion Pin  1   
6  400063 52-16-89  4750-0031 Washer, Spring  1  $2.00
7  300030 3592136  3320-0010 Pin, No.1 Displacer  1  $16.00
8    3592067    No.1 Displacer  1   
9 100095 8033109  4060-0010 Seal, No. 1 Displacer, CT-8 1  $55.00
10  400015 52-01-01  3320-0009 Dowel Pin, CT-8/10 3  $1.00
11  100107 3695118  5400-0003 Collar Assy. CT-8/10 1  $80.00
12    3592304    Cap, No.1 Displacer  1   
13  400052 56-02-10  3850-0036 Retaining Ring, CT-8/10 1  $2.50
14  300038 3588064  4750-0033 Gland Washer, CT-8/10 1  $5.00
15 100094 3592389  4060-0014 Kap-Seal, Gland, CT-8/10 1  $10.00
16  300024 3588011  2540-0002 Gland, Scotch Yoke, CT-8/10  1  $26.00
17  410111 58-03-10  2-111B O-Ring, Gland, CT-8/10 2  $0.50
18 300017 51-03-43  45-00021-001 Bushing, All Models, New Design 1  $25.00
19    8033013    Valve Plate  1   
20 410234 58-03-35  2-234B O-Ring, Crankcase, CT-8/10  1  $1.00
21 410140 580322  2-140B O-Ring, Vessel  1  $1.00
22  300067 3588300  5400-0002 Scotch Yoke  1  $500.00
23  400053 52-07-52  3320-0012 Pin, Locating  1  $1.50
24    3150-001    Bracket, Rocker Arm  1   
25    3588014    Adjusting Bolt  2   
26    3588094G002    Crankcase  1   
27  300021 N/A 1660-0008 Bushing, Rocker Arm  2  $3.50
28  100122 3588013  1010-0001 Rocker Arm & Bushing  2  $86.00
29  400054 52-26-10  3160-0010 Stop Nut  2  $2.00
30  400055 8081139P0001 4155-0071 Compression Spring  2  $4.00 
31  400056 8081139P0002  4155-0070 Valve Spring  2  $4.00
32  300037 3588017  4600-0001 Valve Stem  2  $60.00
33 410013 58-04-52  2-013B O-Ring, Valve  2  $0.50
34  300045 3588084  4600-0009 Exhaust Valve Body  1  $60.00
35  300044 3588085  4600-0008 Inlet Valve Body  1  $60.00
37 300018 3588079  4060-0015 Seal, Inlet Valve  1  $6.00
38 300016 45-010000-001 Bushing, All Models, New Design 1  $25.00
39 410014 58-14-10  2-014B O-Ring, Plug   1  $0.50
40    3588052    Plug  1   
41    51-10-36    Plug  1   
42    51-24-19    Relief Valve  1   
43 410012 58-04-60  2-012B O-Ring, RV, Guide Pin & Plugs 3  $0.50
45  100113 3588055  3320-0013 Guide Pin & Plug  1  $28.00
46 410129 58-04-56  2-129B O-Ring, Sight Glass  1  $1.00
47  300070 3588056  1400-0176 Sight Glass  1  $60.00 
48  3588057    Retainer, Glass  1   
49 400059 56-02-15  3850-0096 Retaining Ring  1  $2.50
50 400009 3543017  1600-0043 Drive Bearing, CT-8/10 1  $32.00
51    3588037    Crankshaft  1   
52 400010 3543016  1600-0044 Valve Bearing, CT-8/10 2  $26.00
53  400057 3588020  2670-0001 Key  1  $9.00
54    3588066    Valve Eccentric  1   
56 410139 58-04-57 2-139B O-Ring, CT-8/10 1  $1.00
57 400011 3543017 1600-0042 Motor Bearing, CT-8/10 2 $26.00
58 410044 58-04-95 2-044B O-Ring, Motor, CT-8/10 2 $1.00
60