Cryopump Repair Parts cryogenics

cryopump repair parts

Cryopump repair parts for the Cryo-Torr* 8/8F and Cryo-Plex** 8/LP Cryopumps.

Cryopump repair parts for the Cryo-Torr* 10, 400/500 and Cryo-Plex**10/16 Cryopumps.

It is recommended that you visually inspect all parts while performing routine maintenance. Check for any signs of excessive wear or damage. Mark any items on this list that may need to be replaced, and file with the pump performance log.

These repair parts were manufactured to meet or exceed the OEM quality standards by a dedicated repair facility conducting major cryopump

overhauls for government and semiconductor fabs on a large scale basis. All parts are Made In USA.

********CAUTION!!!!!*********

All bearings are specially designed aircraft bearings that have been cleaned and repacked with special bearing grease that will not break down in the helium environment! Do not attempt to replace bearings that are purchased from a normal bearing distributor. They will NOT come supplied with the special grease, and will result in cryopump failure or contamination.

IMPORTANT NOTE: THESE REPLACEMENT PARTS ARE NOT OEM SPARE PARTS. THEY ARE FULLY INTERCHANGEABLE PARTS THAT WERE DESIGNED AND MANUFACTURED TO MEET OR EXCEED THE OEM SPECIFICATIONS.

*Cryo-Torr is a registered trademark of Helix Technology Corp., Brooks Automation

**Cryo-Plex is a registered trademark of Austin Scientific Co., Inc.

Review the video to assist in parts identification

cti displacer.jpg cti collar assy.jpg cryopump repair parts cti cryopump rocker arm.jpg

CT-8/8F

Item

Order P/N

Equivalent CTI P/N

Equivalent Austin Scientific P/N

Description

Qty/Pump

Cost Each USD

1

100098

3592009

4060-0011

Seal, No. 2 Displacer, CT-8,400/500

1

$135.00

2

300028

3592011

Tool, Seal Insertion

1

$20.00

3

100116

3592076

1400-0958

No.2 Displacer

1

Inquire

4

400022

52-07-50

3320-0005

Pin, No.2 Displacer

1

$1.00

5

300026

3592069

3320-0006

Trunnion Pin

1

$25.00

6

400063

52-16-89

4750-0031

Washer, Spring

1

$2.00

7

300030

3592136

3320-0010

Pin, No.1 Displacer

1

$16.00

8

100115

3592067

1400-0959

No.1 Displacer

1

Inquire

9

100095

8033109

4060-0010

Seal, No. 1 Displacer, CT-8

1

$55.00

10

400015

52-01-01

3320-0009

Dowel Pin, CT-8/10

3

$1.00

11

100107

3695118

5400-0003

Collar Assy. CT-8/10

1

$95.00

12

300025

3592304

Cap, No.1 Displacer

1

$60.00

13

400052

56-02-10

3850-0036

Retaining Ring, CT-8/10

1

$2.50

14

300038

3588064

4750-0033

Gland Washer, CT-8/10

1

$5.00

15

100094

3592389

4060-0014

Kap-Seal, Gland, CT-8/10

1

$10.00

16

300024

3588011

2540-0002

Gland, Scotch Yoke, CT-8/10

1

$26.00

17

410111

58-03-10

2-111B

O-Ring, Gland, CT-8/10

2

$0.50

18

300017

51-03-43

45-00021-001

Bushing, All Models, New Design

1

$25.00

19

300086

8033013

Valve Plate

1

CALL

20

410234

58-03-35

2-234B

O-Ring, Crankcase, CT-8/10

1

$1.00

21

410140

580322

2-140B

O-Ring, Vessel

1

$1.00

22

300067

3588300

5400-0002

Scotch Yoke

1

$500.00

23

400053

52-07-52

3320-0012

Pin, Locating

1

$1.50

24

300034

3150-001

Bracket, Rocker Arm

1

Inquire

25

100117

3588014

Adjusting Bolt

2

$22.00

26

300088

3588094G002

Crankcase

1

Inquire

27

300021

N/A

1660-0008

Bushing, Rocker Arm

2

$3.50

28

100122

3588013

1010-0001

Rocker Arm & Bushing

2

$86.00

29

400054

52-26-10

3160-0010

Stop Nut

2

$2.00

30

400055

8081139P0001

4155-0071

Compression Spring

2

$4.00

31

400056

8081139P0002

4155-0070

Valve Spring

2

$4.00

32

300037

3588017

4600-0001

Valve Stem

2

$60.00

33

410013

58-04-52

2-013B

O-Ring, Valve

2

$0.50

34

300045

3588084

4600-0009

Exhaust Valve Body

1

$60.00

35

300044

3588085

4600-0008

Inlet Valve Body

1

$60.00

37

300018

3588079

4060-0015

Seal, Inlet Valve

1

$6.00

38

300016

45-010000-001

Bushing, All Models, New Design

1

$25.00

39

410014

58-14-10

2-014B

O-Ring, Plug

1

$0.50

40

300052

3588052

Plug

1

$10.00

41

300040

51-10-36

Plug

1

$10.00

42

51-24-19

Relief Valve

1

43

410012

58-04-60

2-012B

O-Ring, RV, Guide Pin & Plugs

3

$0.50

45

100113

3588055

3320-0013

Guide Pin & Plug

1

$28.00

46

410129

58-04-56

2-129B

O-Ring, Sight Glass

1

$1.00

47

300070

3588056

1400-0176

Sight Glass

1

$60.00

48

300087

3588057

Retainer, Glass

1

$20.00

49

400059

56-02-15

3850-0096

Retaining Ring

1

$2.50

50

400009

3543017

1600-0043

Drive Bearing, CT-8/10

1

$32.00

51

300061

3588037

1985-0001

Crankshaft

1

$290.00

52

400010

3543016

1600-0044

Valve Bearing, CT-8/10

2

$26.00

53

400057

3588020

2670-0001

Key

1

$9.00

54

300053

3588066

4600-0007

Valve Eccentric

1

$70.00

56

410139

58-04-57

2-139B

O-Ring, CT-8/10

1

$1.00

57

400011

3543017

1600-0042

Motor Bearing, CT-8

2

$26.00

58

410044

58-04-95

2-044B

O-Ring, Motor, CT-8/10

2

$1.00

60*

100188

8033248

3100-0033

Drive Motor, Repair/Exchange

1

Inquire

64

400058

52-16-90

4750-0030

Wavy Washer

1

$1.00

65

52-16-91

Flat Washer

1

66

410016

58-04-53

O-Ring, Connector

1

$0.50

60* Drive motors are available for repair or exchange. Drive Motor

CT-10

Parts Unique to CT-10

Item

Order P/N

       Equivalent           CTI P/N

Equivalent Austin Scientific P/N

              Description

Qty/Pump

Cost Each USD

1

100097

3657074P2

4060-0016

Seal, No. 2 Displacer, CT-10

      1

$135.00

9

100096

3657077

4060-0017

Seal, No.1 Displacer,CT-10,400/500

      1

$55.00

7

300068

3657025P

3320-0011

Pin, No.1 Displacer, CT-10, 400/500

      1

$16.00

21

410232

581442

2-232V

O-Ring, Valve Plate/Vessel

      1

$2.00

22

300069

3761009

5400-0004

Scotch Yoke, CT-10, 400/500

      1

$625.00

60

400051

1600-0045

Bearing, Motor, Front, CT-10

      1

$26.00

62

410157

58-64-39

2-157B

O-Ring, Cylinder, CT-10

      1

$.50

CT-7/100

Parts Unique to CT-7/100

Item

Order P/N

   Equivalent CTI P/N

Equivalent Austin Scientific P/N

              Description

Qty/Pump

Cost Each USD

7

300071

1660-0009

Bushing, Upper

      1

$8.00

17

300072

1660-0010

Bushing, Lower

      1

$8.00

22

400065

3543433

1600-0048

Bearing, Cam

      1

$26.00

27

400064

3543135

1600-0049

Bearing, Front, Motor

      1

$26.00

29

400011

3543017

1600-0042

Bearing, Rear, Motor

      1

$26.00

************************************

Standard Complete Repair Kits (Helium Side)

$390.00

Custom Repair Kits Are Available-Select only the parts you require

For 3 Phase Motor Kits-Add $20.00

P/N: 100151 (8/8F)

P/N: 100152 (10)

P/N: 100153 (400/500)

cryopump repair parts

P/N: 100151 (8/8F)

Item Order P/N Equivalent CTI P/N Equivalent Austin Scientific P/N Description Qty/Pump

1

100098

3592009

4060-0011

Seal, No. 2 Displacer,

CT-8,400/500

1

9

100095

8033109

4060-0010

Seal, No. 1 Displacer, CT-8

1

15

100094

3592389

4060-0014

Kap-Seal, Gland, CT-8/10

1

17

410111

58-03-10

2-111B

O-Ring, Yoke Gland

2

18

300017

51-03-43

45-00021-001

Bushing, CT-8/10

1

20

410234

58-03-35

2-234B

O-Ring, Crankcase, CT-8/10

1

21

410140

580322

2-140B

O-Ring, Vessel

1

33

410013

58-04-52

2-013B

O-Ring, Valve

2

37

300018

3588079

4060-0015

Seal, Inlet Valve

1

38

300016

45-010000-001

Bushing

1

39

410014

58-14-10

2-014B

O-Ring, Plug

1

43

410012

58-04-60

2-012B

O-Rings

3

46

410129

58-04-56

2-129B

O-Ring, Sight Glass

1

49

400059

56-02-15

3850-0096

Retaining Ring

1

50

400009

3543017

1600-0043

Drive Bearing,

CT-8/10

1

52

400010

3543016

1600-0044

Valve Bearing,

CT-8/10

2

56

410139

58-04-57

2-139B

O-Ring, CT-8/10

1

57

400011

3543017

1600-0042

Motor Bearing,

CT-8/10

2

58

410044

58-04-95

2-044B

O-Ring, Motor,

CT-8/10

2

P/N: 100152 (10)

Item Order P/N Equivalent CTI P/N Equivalent Austin Scientific P/N Description Qty/Pump

1

100097

3657074P2

4060-0016

Seal, No. 2 Displacer, CT-10

1

9

100096

3657077

4060-0017

Seal, No. 1 Displacer,

CT-10, 400/500

1

15

100094

3592389

4060-0014

Kap-Seal, Gland, CT-8/10

1

17

410111

58-03-10

2-111B

O-Ring, Yoke Gland

2

18

300017

51-03-43

45-00021-001

Bushing, CT-8/10

1

20

410234

58-03-35

2-234B

O-Ring, Crankcase, CT-8/10

1

21

410232

581442

2-232V

O-Ring, Vessel

1

33

410013

58-04-52

2-013B

O-Ring, Valve

2

37

300018

3588079

4060-0015

Seal, Inlet Valve

1

38

300016

N/A

45-010000-001

Bushing

1

39

410014

58-14-10

2-014B

O-Ring, Plug

1

43

410012

58-04-60

2-012B

O-Ring

3

46

410129

58-04-56

2-129B

O-Ring, Sight Glass

1

49

400059

56-02-15

3850-0096

Retaining Ring

1

50

400009

3543017

1600-0043

Drive Bearing,

CT-8/10

1

52

400010

3543016

1600-0044

Valve Bearing,

CT-8/10

2

56

410139

58-04-57

2-139B

O-Ring, CT-8/10

1

57

400011

3543017

1600-0042

Motor Bearing,

CT-8/10

1

58

410044

58-04-95

2-044B

O-Ring, Motor,

CT-8/10

2

60

400051

1600-0045

Motor Bearing,

CT-10

1

62

410157

2-157B

O-Ring, Cylinder

1

P/N: 100153 (400/500)

Item Order P/N Equivalent CTI P/N Equivalent Austin Scientific P/N Description Qty/Pump

1

100098

3592009

4060-0011

Seal, No. 2 Displacer,

CT-8,400/500

1

9

100096

3657077

4060-0017

Seal, No. 1 Displacer,

CT-10, 400/500

1

15

100094

3592389

4060-0014

Kap-Seal, Gland

1

17

410111

58-03-10

2-111B

O-Ring, Yoke Gland

2

18

300017

51-03-43

45-00021-001

Bushing

1

20

410234

58-03-35

2-234B

O-Ring, Crankcase

1

21

410232

581442

2-232V

O-Ring, Vessel

1

33

410013

58-04-52

2-013B

O-Ring, Valve

2

37

300018

3588079

4060-0015

Seal, Inlet Valve

1

38

300016

N/A

45-010000-001

Bushing

1

39

410014

58-14-10

2-014B

O-Ring, Plug

1

43

410012

58-04-60

2-012B

O-Ring

3

46

410129

58-04-56

2-129B

O-Ring, Sight Glass

1

49

400059

56-02-15

3850-0096

Retaining Ring

1

50

400009

3543017

1600-0043

Drive Bearing

1

52

400010

3543016

1600-0044

Valve Bearing

2

56

410139

58-04-57

2-139B

O-Ring

1

57

400011

3543017

1600-0042

Motor Bearing

1

58

410044

58-04-95

2-044B

O-Ring, Motor

2

60

400060

1600-0046

Motor Bearing

1

62

410157

2-157B

O-Ring, Cylinder

1

All bearings are specially designed aircraft bearings that have been cleaned and repacked with special bearing grease that will not break down in the helium environment!

***********************************************************************************************************************

Seal and O-Ring Repair Kits

CT-8/8F Kit P/N: 100130S

CT-10 Kit P/N: 100131S

CT-400/500 Kit P/N: 100132S

Kit includes both Displacer Seals, Kap-Seal Gland, Inlet Valve Body Seal and O-Rings.

These Kits Will Work For The On-Board*** Cryopumps

Simple repair where timing is not an issue.

Special: $210.00

Seal Kit Instructions

Kit includes Items	ITEM DESCRIPTION	QTY
1	Seal, #2, CT-8/8F or CT-10/400/500	1
9	Seal, #1, CT-8/8F or CT-10/400/500	1
15	Kap-Seal Gland	1
17	O-Ring, Scotch Yoke Gland	2
20	O-Ring, Crankcase	1
21	O-Ring, Valve Plate/Vessel, CT-8/8F	1
33	O-Ring, Valve Body	2
37	Seal, Inlet Valve	1
39	O-Ring, Bottom Crankcase Plug	1
43	O-Ring, Guide Pin Plug & R.V.	3
46	O-Ring, Sight Glass	1

cryopump displacer seal cryopump seal

Item 9, #1 Displacer Seal Item 1, #2 Displacer Seal Item 15, Kap Seal Item 37, Inlet Valve Seal

cryopump repair parts

***On-Board is a registered trademark of Helix Technology Corp., Brooks Automation

**************************************************************************

ACC TIP Sheet!

Preventive maintenance procedure to avoid vacuum/pressure leaks.

During routine maintenance on the HELIUM side of your cryopump, it is also recommended that you replace the critical seals in components that are mounted on the exterior of your cryopump vessel. This includes the seals in your......

Pressure Relief Valve (PRV) and seals in your Regeneration Purge Fitting (Purge Tube Assy/RPF)

For All Models--Fast and simple procedure!

ACC Order P/N Equivalent           CTI P/N Equivalent Austin Scientific P/N Description Qty/Pump
Cost    Each USD

     100134PTA

       N/A

    SK-RPF

Repair Kit, Purge Tube Assy.

       1

$4.00

     100135PRV

       N/A

    SK-RV

Repair Kit, Pressure Relief Valve

        1

$3.00

Cryopump VACUUM Side Components

15K Condensing Arry Kits

parts Indium CTI Cryopump parts Indium CTI

10" & 16" Repair Parts Available

cryopump wrenches tools2.jpg

Cryopump Wrench Set $75.00 P/N:100412

100% Satisfaction Guaranteed On All Parts

Net 30 with approved credit

Easy and secure payments with Paypal